METHOD AND APPARATUS FOR DETOXIFYING EXHAUST GAS

摘要

PROBLEM TO BE SOLVED: To eliminate trouble such as equipment stop loss or the like while holding a beneficial point of a wet method by eliminating the deposition of a solid substance at a gas-liquid contact place while keeping gas-liquid contact efficiency high. SOLUTION: A solvent 5 (oil, fluorine type inert liquid) solubilizing a substance to be detoxified (SiHCl3) by the gas-liquid contact with exhaust gas 4 (SiHCl3, HCl, H2) and not forming a harmless solid substance (SiO2) is prepared. The solvent 5 and the exhaust gas 4 are brought to a gas-liquid contact state in an absorbing apparatus 2 to form a soln. 5' of a substance to be detoxified (solvent 5 having absorbed SiHCl3). In a reaction apparatus, the formed soln. 5' of the substance to be detoxified (solvent 5 having adsorbed SiHCl3) and a specific liquid (H2O) are reacted (SiHCl3+2H2O→3HCl+SiO2+H2) to form a harmless solid substance (SiO2).