| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vacuum pump to cover the whole pressure range from the atmospheric pressure to the high vacuum up to above 10-4 mbar comprising one body, with compact structure, low cost, and small occupied floor area. SOLUTION: This vacuum pump comprises two-system gas friction pumps 6 and 7, and a pump 8 on the downstream side thereof. The gas flow of the two-system gas friction pumps is collected by a coupling element 26 inside the pump, and compressed to the atmospheric pressure by the pump on the downstream side thereof. The gas friction pumps are favorably formed as a two-system Holbeck pump and the pump on the downstream side is formed of a side channel pump. The compact structure of the pump is complemented by a stator element 15 of the side channel pump comprising a non-divided disk. This structure is realized by a rotor disk 13 fixed to a rotor 4 by a stop ring 14.</p> |
