DEVICE FOR MANUFACTURING MAGNETIC RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To form a hard carbon film on a surface of even an insulating substrate by placing the substrate, disposing a grid electrode, each in a reaction chamber adjacent to a plasma generating chamber and impressing negative bias voltage to the grid electrode. SOLUTION: Gas consisting essentially of hydrocarbon gas is introduced to a plasma generating chamber (cavity) 2 within a plasma CVD device through a gas flow controller 6 and a gas introducing pipe 5. And a magnetic field is impressed to the gas through an electromagnetic coil 10 and aμ-wave is introduced from aμ-wave power source through aμ-wave waveguide 4 and an insulating window 7 to the gas. Plasma is generated in the plasma generating chamber 2 by electronic cyclotron resonance. A substrate 11 and a grid electrode 12 are provided within a vacuum vessel 1 adjacent to the plasma generating chamber 2 and a bias voltage is impressed on the grid electrode 12 from a power source 13. Ions in the plasma generated are accelerated by the grid electrode 12 and go through a grid of the grid electrode and collide against the substrate to accumulate on the substrate.