| 摘要 |
PROBLEM TO BE SOLVED: To produce a laminate in which a film excellent in photocatalyst activity and stain-proofing properties is laminated on a substrate by the sputtering of a conductive sintered body target obtained by sintering a mixture comprising titanium oxide particles and niobium oxide particles in a pressure- reducible atmosphere. SOLUTION: A conductive sintered body target obtained by sintering a mixture comprising titanium oxide particles and particles of at least one metal oxide selected from the group consisting of niobium oxide, tantalum oxide, vanadium oxide, zirconium oxide, tin oxide, chromium oxide, and copper oxide in a pressure-reducible atmosphere is subjected to sputtering. In this way, a laminate 1 in which a film 3 containing photocatalyst-active titanium oxide as a main component is formed on a substrate 2 is produced. In the conductivity of the target, the surface resistance is set up at 500Ω/(square) or blow. The temperature of the substrate 2 during film making is set up at 170-27 deg.C, preferably at 200-250 deg.C.
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