| 摘要 |
PROBLEM TO BE SOLVED: To enhance printing power even when a piezoelectric element formed by thin film method is employed, by specifying the displacement of a pressure chamber due to driving of the piezoelectric element in an ink jet head causing volumetric displacement of the pressure chamber through a bimorph structure by the width of the piezoelectric element and the depth of the pressure chamber. SOLUTION: An ink jet head causing volumetric displacement of a pressure chamber is formed of a bimorph structure comprising a piezoelectric element of 20μm thick or less and a diaphragm. The ink jet head is formed to satisfy a mathematical expression V0/L22.b>550×10-6, where V0 [m3] is the volumetric displacement of the pressure chamber due to driving of the piezoelectric element in the ink jet head, L2 [m] is the width of the piezoelectric element, and b [m] is the depth of the pressure chamber. Since an electrode layer 81, a piezoelectric element 82, and a diaphragm 86 are formed sequentially on a target substrate 80 by thin film method, a highly accurate and thin actuator part having a shape identical to that of individual electrode can be formed with high reliability.
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