发明名称 MANUFACTURE OF IMAGE FORMING DEVICE, MANUFACTURING APPARATUS THEREOF, AND THE IMAGE FORMING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To correct relative position slippage due to thermal expansion or softening of frit glass and to stick together an electron source substrate and a face plate at high position accuracy, by conducting a sealing process for joining a first substrate and a second substrate through a joining member and a positioning process of the first substrate and the second substrate in vacuum. SOLUTION: In the manufacturing apparatus of a flat-type image forming device, joining members 23 are formed previously in a face plate 141 and a rear plate 145, and connected within a vacuum chamber 10 via support frames 22. An adjusting stage 30 adjusts positions in the X, Y,θdirections of the face plate 141, and a heating plate 31 heats the face plate 141. A Z-adjusting mechanism 32 makes the face plate 141, the rear plate 145, and the support frames 22 contact, and then applies pressure on them. An adjusting stage 33 adjusts the positions in the X, Y,θ-directions of the rear plate 145, and a heating plate 34 heat the rear plate 145.</p>
申请公布号 JP2001028241(A) 申请公布日期 2001.01.30
申请号 JP20000191584 申请日期 2000.06.26
申请人 CANON INC 发明人 NAKANISHI KOICHIRO;TAKAMATSU OSAMU;TAGAWA MASAHIRO;UEDA KAZUYUKI;KOYAMA SHINYA
分类号 H01J9/26;H01J9/02;H01J9/385;H01J9/40;(IPC1-7):H01J9/26 主分类号 H01J9/26
代理机构 代理人
主权项
地址