| 摘要 |
PROBLEM TO BE SOLVED: To provide a practical noise-resistance structure for a thin-film type sensor. SOLUTION: The thin-film type pressure sensor 1, equipped with a metallic diaphragm 4 which bends corresponding to pressure, stain gauges which are arranged on the top surface of the metallic diaphragm 4 across an insulating layer, and a detecting circuit composed of a bridge circuit including the stain gauges, is equipped with a metallic sensor housing 10 fitted with the metallic diaphragm 4 and an insulating bush 20, an insulating plate 21, and an O ring 24 as an insulator interposed between the sensor housing 10 and metallic diaphragm 4.
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