| 摘要 |
A narrow-band oscillation excimer laser has optics which are excellent in durability and light quality, wherein an optical component is a fluoride component (7), and wherein a cleavage plane (20) of the fluoride component (7) is at least substantially parallel with at least one of (a) an incidence side plane (23), for a laser beam (3) entering the fluoride component(7), and (b) an exit side plane (23a), for the laser beam (3) exiting from the fluoride component (7). The fluoride component (7) is positioned in the excimer laser so that the cleavage plane (20) of the fluoride component (7) is at least substantially perpendicular to a light path of the laser beam (3) passing through the inside of the fluoride component (7). A visible mark (27) indicates a direction of the cleavage plane (20).
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