Photoresponsive device for detection of long and short wavelength photons

摘要

A photoresponsive device wherein a plurality of slots is formed in a continuous polycrystalline silicon film that forms a top electrode of the photoresponsive device structure. The resulting "picket fence-like" fingers are capable of generating a depletion region that extends beyond the physical extent of the fingers themselves. The shorter wavelengths of light can reach these unobstructed depletion areas of the substrate and be rapidly detected instead of being absorbed in the electrode. By appropriate spacing of the individual fingers, the individual depletion regions can be effectively merged into one continuous depletion region.