发明名称 Alkaline developing solution for radiation sensitive composition and development method
摘要 An alkaline developing solution for a radiation sensitive composition, which has no undissolved products even when the concentration of a pigment contained in a radiation sensitive composition is high, which does not cause such problems as scum, the residue after development and re-adhesion, and which can form pixels having a sharp pattern edge.The alkaline developing solution for a radiation sensitive composition is an aqueous solution which contains (A-1) at least one inorganic alkaline compound and (A-2) at least one organic alkaline compound selected from the group consisting of alkanolamines and alkylamines or which contains the above component (A-1), the above component (A-2) and (B) at least one nonionic surfactant selected from the group consisting of etherified polyoxyethylenes and etherified polyoxyethylene-polyoxypropylene block copolymers.
申请公布号 US6180322(B1) 申请公布日期 2001.01.30
申请号 US19990289963 申请日期 1999.04.13
申请人 JSR CORPORATION 发明人 SAKURAI KOUICHI;IIJIMA TAKAHIRO;ITO YUKIKO;NEMOTO HIROAKI
分类号 H01L21/027;G03F7/32;(IPC1-7):G03F7/26 主分类号 H01L21/027
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