Electron beam pattern-writing column,申请号IL19960121377-传众专利搜索

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发明名称	Electron beam pattern-writing column
摘要
申请公布号	IL121377(A)	申请公布日期	2001.01.28
申请号	IL19960121377	申请日期	1996.12.11
申请人	LEICA LITHOGRAPHY SYSTEMS LTD.	发明人
分类号	H01J37/12;H01J37/30;H01J37/305;H01L21/027;(IPC1-7):H01J37/30	主分类号	H01J37/12
代理机构		代理人
主权项
地址

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