| 摘要 |
<p>PURPOSE: A processing liquid is purged from a processing liquid delivery system by a method, wherein non-thermal energy is transmitted from a nonthermal energy source to a processing liquid delivery line and directly coupled to the processing liquid delivery line, thereby preventing thermal decomposition of the processing liquid. CONSTITUTION: A processing liquid delivery system has a processing liquid line (43) connected to a nonthermal energy source (45), and the nonthermal energy source (45) generates ultrasonic energy that acts on purging processing liquid through the wall of the processing liquid delivery line (43), and ultrasonic energy generates nonthermal energy such as electromagnetic energy. When the nonthermal energy source (45) serves as an ultrasonic energy source, the nonthermal energy is dispersed along a conductive medium (51), filled in between the processing liquid delivery line (43) and a sheath (53). When the nonthermal energy 45 is an electromagnetic energy source, electromagnetic energy is connected directly to the processing liquid delivery line (43), so as to make the delivery line (43) useful as a conductive medium.</p> |
