| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating device for a microscope by which the temperature of a transparent plate for heating on which an inspection sample is placed or a transparent plate for protection are always kept at a specified temperature, whose temperature disribution is uniform, and which can be made thinner. SOLUTION: As to this heating device 1 for the microscope; the end parts of a pair of electrodes 7 and 7 extend in a direction where they come closer to each other so that a current rapidly starts flowing in a transparent conductive film 6 existing in the opposed area of the electrodes when the electrodes 7 and 7 are energized. Consequently, the temperature of the film 6 existing on the opposed area of the electrodes 7 and 7 has high responsiveness to the energizing of the electrodes 7 and 7. Therefore, temperature detected by a temperature sensor 13 nearly coincides with that of the central part of the heating transparent plate 3, so that overshoot that the temperature of the central part becomes higher than a set temperature can be prevented, and adequate temperature adjustment can be performed.
|
