DISPLAY DEVICE AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To make it possible to excellent patterning of upper electrodes without degrading the performance of an electron source of an MIM type tunnel diode structure by separating the upper electrodes between signal wiring by utilizing the serrated parts disposed along the signal wiring. SOLUTION: The MIM type electronic power source array 1 substrate is composed of stripe-like lower electrodes 2 which are formed on a substrate 1 consisting of soda glass, etc., and extend in an X direction, a field insulating film 5 and tunnel insulating film 6 which are formed on the lower electrodes 2, the stripe-like signal wiring 3 which is formed on these insulating films and extends in a Y direction and the upper electrodes 4 which are formed on the signal wiring 3. The lower electrodes 2 and the signal wiring 3 are so formed as to intersect approximately orthogonally with each other. Electron release parts are formed in the portions within the regions where the lower electrodes 2 and the signal wiring 3 overlap. These electron release parts are formed to a matrix form. The deposited upper electrodes 4 are broken in serration by the serrate structure consisting of the grooves 30 disposed at the substrate 1 and are automatically separated by each of the signal wiring 3.