发明名称 WORK HOLDING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To improve workability by sucking and holding a work with a work holding apparatus, maintaining such sucking force and thereafter canceling the sucking force. SOLUTION: Many air paths 15 which are connected in the lateral and vertical directions are formed within a disc type base 11 of a work holding apparatus, the air paths 15 are communicated with the backside and side, the communicating part at the backside is provided. With a non-return valve as a sucking force maintaining means 13 and the communicating part in the side is provided with a leak member as the sucking force canceling means 14. Facing this air paths 15, many fine holes 16 are provided at the work sucking surface 12, thereby placing and holding a work at the work sucking surface 12. Sucking of work to the work sucking surface 12 is canceled with a leak member. As a result, workability can be improved.</p>
申请公布号 JP2001024050(A) 申请公布日期 2001.01.26
申请号 JP19990194207 申请日期 1999.07.08
申请人 DISCO ABRASIVE SYST LTD 发明人 TATEISHI TOSHIYUKI
分类号 H01L21/683;B25J15/06;H01L21/301;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/683
代理机构 代理人
主权项
地址