| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric angle of oscillation speed sensor whose characteristics are made stable by simplifying a structure and a manufacturing process, reducing manufacturing costs, and increasing working precision, and a method for manufacturing the oscillator. SOLUTION: An oscillator 30 of a piezoelectric angle of oscillation speed sensor is constituted of a piezoelectric body 35 shaped like a square pole, and a first divided electrode 33a and a second divided electrode 33b are formed on a first die face 33, and a third divided electrode 34a and a fourth divided electrode 34b are formed on a second side face 34. This piezoelectric body 35 is supported by the node of oscillation, and an AC voltage is impressed to the electrode for exciting driving (the first divided electrode) 33a, and the both edges related with the axial direction are allowed to resonate and oscillate as free edges, and a voltage difference generated due to the generation of a Coriolis force when an angle of rotation speed is added is detected from two electrodes for detection (the first divided electrode 33a and the second divided electrode 33b). |
