| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for moving container which is high in safety and simplified. SOLUTION: An apparatus 20 for moving a carrier C, which houses a wafer W comprises a carry-in stage 21 for carrying in the carrier C, a carry-out stage 22 for carrying out the carrier C, a taking-housing stage 23 for taking the wafer W out of the carrier C and housing the wafer W in the carrier, and a moving table 24 for horizontally moving the carrier C between the carry-in and -out stages 21, 22 and the take out housing stage 23, and a means 40 for moving the moving table 24 is disposed below the carry-in and -out stages 21, 22 and the taking-housing stage 23.
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