| 摘要 |
PROBLEM TO BE SOLVED: To simply and highly precisely clean and remove spacers on a substrate for a liquid crystal display panel to make the substrate as clean as a new substrate. SOLUTION: A spacer removing device comprises an ionizer 10 which ionizes ambient air and supplies it to a surface of a substrate 201 and a modified cleaner 20 which is made by modifying a noncontact cleaner. The modified cleaner 20 is provided with a function to impart ultrasonic vibration to the air blown to the substrate surface, a function to suck and remove the air being close to the substrate surface and a filtering function to remove dust in the sucked air. In the case of removing spacers S on the substrate, the substrate is held on the sucking table 202 and a proper gap G is set between the cleaner head 102 and the substrate surface. Subsequently the ionizer and the modified cleaner 20 are simultaneously operated, the sucking table 202 is moved while maintaining the gap G, the dust free air is supplied from an air discharge port 102b to release the spacers and, at the same time, the ambient air containing the released spacers is sucked and removed via an air sucking port 102c.
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