| 摘要 |
PROBLEM TO BE SOLVED: To facilitate manufacturing processes, to prevent the occurrence of pattern displacements, and to obtain a highly precise pattern. SOLUTION: At least two reference holes 21 are provided in a metal substrate 22. By using metal masks 24, 28, and 31 with holes 23, 27, and 30 which match the reference holes 21 in a state that reference pins 25 are inserted into the holes 23, 27, and 30 and positioned, insulating films 26, thin films 29 for detecting distortion, and electrodes 32 are formed.
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