| 摘要 |
PROBLEM TO BE SOLVED: To reduce residual ozone during evacuation of a gas from a processing container. SOLUTION: This oxidation apparatus comprises a processing container 1 for containing a body w to be processed, a heating means for heating the body 2 contained in the container 1, a processing gas supplying means 60 for supplying a processing gas containing ozone to the container 1, and an evacuation system 50 for evacuating the gas from the container 1, while evacuating the container 1, and this apparatus oxidizes the body 2 by dissolving the ozone inside the container 1. In this apparatus, the system 50 is provided with a thermally dissolving unit 55 for thermally dissolving the ozone.
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