| 摘要 |
PROBLEM TO BE SOLVED: To obtain a substrate rotating dryer which is capable of lessening particles attached to a substrate, drying the substrate keeping it high in cleanliness, and shortening a timer required for rotary drying. SOLUTION: A substrate is made to start rotating, after a prescribed time Tb has elapsed after a tank exhaust damper 52 is opened, by which air flow which is exhausted outside of a chamber through an tank exhaust duct via a chamber exhaust vent is previously formed around the substrate inside the chamber. Then the substrate is rotated, so that droplets or particles which are attached to the substrate are made to fly off from the substrate to intensively form misty suspended matter in an initial stage of rotation, the misty suspended matter is quickly and surely exhausted to the outside of the chamber, together with a flow of air from the start of rotation. Liquid, flying off from the substrate in an initial stage of rotation, is restrained from wetting the inner wall surface of the chamber, and a time required for rotary drying can be shortened.
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