| 摘要 |
PROBLEM TO BE SOLVED: To establish a method to quickly and stably form an oxide conductive thin film subjected to a surface treatment having an excellent light confining effect. SOLUTION: An oxide conductive thin film is formed by an electrodeposition method on a base board 111 and an etching source is in gasified condition introduced into a processing vessel 109 for etching so that an etching gas atmosphere 110 is formed, and the surface of the oxide thin film is exposed to the atmosphere 110 to undergo an etching process, and the etched surface is subjected to dry etching.
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