| 摘要 |
<p>PURPOSE: A vacuum treatment method is provided to improve an efficiency of sample treatment in a vacuum treatment apparatus as a whole in an operation for parallel processing of samples in a plurality of treatment chambers. CONSTITUTION: A vacuum treatment apparatus comprises a plurality of cassettes(1-3) for housing samples, means(4) for carrying the samples, a plurality of vacuum treating chambers(8-11) for treating the samples one by one, a means for exhausting at reduced pressures the treating chambers(8-11), a loading chamber(6) and unloading chamber(12), both communicating with the treating chambers(8-11), and an apparatus control means(15) for controlling the carrying and treating of samples. The control means(15) measures the sample carrying time and the treating times in the treating chambers(8-11), and determines the order of taking out the samples from the cassettes(1-3), based on the measured times.</p> |
