发明名称 LIQUID DISCHARGE HEAD, MANUFACTURING METHOD THEREOF, AND MICROELECTROMECHANICAL DEVICE
摘要 PURPOSE: A liquid discharge head is provided to exhibit excellent durability and reliability through a heater for discharge of a movable member in a liquid flow path. CONSTITUTION: A liquid discharge head comprises a substrate(1), a ceiling plate(3) connected to the substrate(1), a liquid flow path(7) formed between the substrate(1) and the ceiling plate(3), and a cantilever-like movable member(206) having a fixed end fixed to the substrate(1) and a free end extending into the liquid flow path(7). The movable member is formed of a lower protective layer, a heat generating resistive layer, a lower electrode layer, an insulating layer, an upper electrode layer, and an upper protective layer stacked from the side of the substrate in the mentioned order, wherein application of a voltage to a heat generating portion of the heat generating resistive layer causes bubbling of a liquid in the liquid flow path between the movable member(206) and the substrate(1) to discharge the liquid.
申请公布号 KR20010007234(A) 申请公布日期 2001.01.26
申请号 KR20000030703 申请日期 2000.06.05
申请人 CANON KABUSHIKI KAISHA 发明人 IMANAKA YOSHIYUKI;OZAKI TERUO;KUBOTA MASAHIKO;MOCHIZUKI MUGA;YAMANAKA AKIHIRO
分类号 B41J2/01;B41J2/14;B41J2/16;(IPC1-7):B41J2/01 主分类号 B41J2/01
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