| 摘要 |
PROBLEM TO BE SOLVED: To provide a valve attaching method capable of suppressing the generation of impurities by reducing the area of a flow passage in a side opened to atmosphere inside a valve and increasing purging efficiency so as to limit transformation or corrosion caused by the reactive material of the valve, and shortening a device starting time by supplying an originally pure reactive material to a specified location within a short time. SOLUTION: According to this valve attaching method, when a valve is attached to a source bottle 1, a flow passage 61G opened in a valve seat 61H with respect to the working space 61D of a valve element 62 inside a valve body 61 is opened to the atmosphere side, and a flow passage 61F opened in a part other than the valve seat 61H with respect to the working space 61D is opened to the atmosphere side of the reactive material to connect the valve 6 to the source bolt 1.
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