| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate rotating and drying device capable of reducing particles adhering to the substrate and drying the substrate under a high degree of cleanliness. SOLUTION: This device is constructed such that a tank evacuating damper is opened after a predetermined time elapses upon closing a chamber opening or closing lid 18. In this case, in order to release the held state of a clamped substrate and a holding state of a holder 19, the tank evacuating damper is opened just after closing the chamber opening/closing lid 18, after an elapse of a period of time when air-tightness is unstable during the course of deformation of a resilient packing 14 installed to perform an air-tight closure of the chamber opening or closing lid 18 to an attitude for air-tight closure.
|
