| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holding device which is capable of easily holding samples, such as reticules and the like at prescribed positions and an aligner equipped with the same. SOLUTION: A sample holding device is equipped with a holding member 17 with a holding plane 16, that holds a reticule as a sample and a mechanism 23 which tilts the holding plane 16 corresponding to the deformation of the specimen held by the holding plane 16. It is preferable that the device be furthermore equipped with a sensor 13B, which detects the amount of deformation of the sample held by the holding plane 16 and a control device 25 which controls the mechanism 23, in accordance with the detection result of the sensor 13B. For instance, the inclination of the reticule 1 chucked by the holding plane 16 can be regulated by controlling the mechanism 23.
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