SCRIBING METHOD USING LASER

摘要

PURPOSE: A scribing method using laser is provided to prevent an unnecessary crack by forming a vertical crack with beaming a CO2 laser on a glass to generate a heat transformation. CONSTITUTION: A first process forms a vertical crack in a first direction, and shallows the depth of the crack formed in a second direction against the crack of the first direction when forming a vertical crack in the second direction perpendicular to the first direction. A second process decreases a laser output from the second direction as much as 10-40% to that from the first direction in case a relative moving speed of laser to a substrate in the first direction is equal to that in the second direction. A third process increases the relative moving speed of laser output from the second direction as much as 110-140% to that from the first direction in case the laser output from the first direction is equal to that from the second direction.