| 摘要 |
PROBLEM TO BE SOLVED: To easily analyze the mass (size) of a cluster if it has a large grain size of the order of 10 nm or more. SOLUTION: This device is equipped with first deflection electrodes 30, 31 for giving acceleration to an ion cluster flying in a prescribed direction so as to deflect its trajectory in a direction normal to the flying direction, and second deflection electrodes 32, 33 for giving acceleration to the ion cluster deflected by the first deflection electrodes 30, 31 so as to deflect it in the direction opposite to the flying direction, and a collector 36 for detecting the ion cluster whose trajectory is changed by the second deflection electrodes 32, 33. A micro-channel plate is used as the collector 36.
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