TRAP DEVICE

摘要

PURPOSE: To reliably capture a low vapor pressure component in exhaust gas and to prevent re-dispersion of the captured substance. CONSTITUTION: This trap device 30 is provided with a trap container 36 positioned in the downstream side of a vacuum processing chamber process a substrate and a low vapor pressure component in exhaust gas introduced in the trap container 36 is stacked in the trap container 36 for removal. A cooling device 50 is provided for cooling exhaust gas to temperature lower than a condensation temperature of an easily liquefiable gas component contained in the exhaust gas.