| 摘要 |
PROBLEM TO BE SOLVED: To improve the detection of the acceleration of a low frequency by providing polarization axes of two piezoelectric elements in such a state as being parallel to a face in contact with the two piezoelectric elements and opposed to each other. SOLUTION: A second piezoelectric element 2 stuck to a first piezoelectric element 1 in contact with its bottom face by direct bond is provided. The two piezoelectric elements 1, 2 are composed of single crystals belonged to a trigonal system 3m. The polarization axes of the two piezoelectric elements 1, 2 are so provided as to be parallel to a contact face, opposed to each other, and set the contact face and the vertical direction to the maximum sensitivity direction. The two piezoelectric elements 1, 2 are provided with a first and a second external electrode layer 8, 4 mated with the respective shapes in the opposite side to the contact face. This constitution can provide a stable acceleration device with less dispersion and allow it to use a resistance part with high resistance value so as to improve the low frequency signal.
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