| 摘要 |
PROBLEM TO BE SOLVED: To obtain a positive type resist remover which does not cause the deterioration and corrosion of copper in the removal of a positive type resist on a copper wiring material and exhibits superior removing performance at low temperature. SOLUTION: The removing solution contains a tetraalkylammonium hydroxide, water, a triazole compound, a gallic acid derivative and one or more compounds selected from the group comprising an amido compound, an imidazolidinone compound and a sulfoxide compound. The contents of the triazole compound and the gallic acid derivative are 0.1-10 wt.% respectively. |
