| 摘要 |
PROBLEM TO BE SOLVED: To obtain a substrate rotating dryer which is capable of lessening particles attached to a substrate and drying the substrate, keeping it high in cleanliness. SOLUTION: A tank exhaust damper 52 is closed after a prescribed time Tc has elapsed after a substrate is stopped from rotating, so that the tank exhaust damper 52 is kept open for a prescribed time Tc, even if the substrate is stopped from rotating. At a time when the substrate stops from rotating, misty suspended matter and particles suspended in the chamber are surely discharged out, together with an exhaust flow which continues flowing toward a tank exhaust duct for a prescribed time Tc, so that the substrate can be dried out, keeping it high in cleanliness.
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