| 摘要 |
PROBLEM TO BE SOLVED: To sense a liquid leakage within a relatively short time by measuring a flow rate difference of a refrigerant flowing in both a pair of pipings constituting forward and return paths, sensing the flow rate difference arriving at a predetermined value or more, and deciding the leakage. SOLUTION: A cooling circulating device A containing a pump 11, a tank 13 or the like and an IC device B mounting a material 6 to be cooled are connected by forward piping 21 and return piping 22. The liquid leakage sensing apparatus 30 measures currents flowing through flow rate measuring means 31, 32 mounted at both the pipings 21, 22, and an arithmetic unit 33 obtains a difference between the measured flow rate signals. A comparing means 34 compares a signal corresponding to the obtained flow rate difference with a set value of a setter 35. The liquid leakage is detected in the state that the relationship between the flow rates W1 and W2 of both the means 31 and 32 becomes W1>W2, and an alarm signal is generated when the corresponding signal value of the difference exceeds the set value. That is, the difference of the flow rates of the refrigerants flowing through both the pipings 21, 22 is detected, and the liquid leakage is decided.
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