| 摘要 |
PROBLEM TO BE SOLVED: To obtain a truck for attaching and detaching the reaction tube of a structure, where the deli very and receipt of other equipment to a quartz tube and from the quartz tube can be made at the position of attachment and detachment of the quartz tube, while stably keeping the quartz tube without using a slide mechanism. SOLUTION: This truck 10 for attaching and detaching a reaction tube has a main frame part 11, provided in such a way as to be freely movable with wheels 13 and 16, two support legs 15, a vertical frame part 14 to couple the frame part 11 with the support legs 15, a base stand having a hand grip 12 and a reaction tube support table 19, which is horizontally fixed in the base stand at a previously set height and is provided in such a way as to be able to vertically support the tube 51 at a regulated position on the upper surface of the base stand, and in a semiconductor manufacturing device 1, the truck 10 is used at the attachment or detachment of the tube 51, which is moved vertically utilizing an elevator 21 to the elevator 21 or from the elevator 21, for example. In this case, the truck 10 is used so that the truck 10 vertically supports the tube 51 at a regulated position on the table 19 and can freely carry the tube 51 which is supported by the truck 10 in between directly under a center CC of a furnace port provided in a reactor and the outside of the device 1. |
