| 摘要 |
PROBLEM TO BE SOLVED: To make a thermal resistance between a thermoelectric module and a heat exchanger extremely small and to enhance the performance of the thermoelectric module by installing the heat exchanger at least on a thermoelectric plate, on one side, in the thermoelectric module in such a way that the thermoelectric plate comes directly into contact with a fluid housed at the inside of the heat exchanger. SOLUTION: A temperature regulating apparatus 10 comprises a mounting plate 10, a water-cooled plate 20 and many thermoelectric modules 30 which are interposed and mounted between them. When the respective thermoelectric modules 30 are electrified, a substrate W which is placed on the mounting plate 10s is heated/cooled, the distribution of the temperature of the mounting plate 10 composed of a platelike heat pipe becomes uniform, and the substrate W is heated/cooled by keeping the uniform distribution of the temperature. At this time, a thermoelectric plate 33 on the upper side of the thermoelectric modules 30 come directly into contact with a working medium 10L housed at the inside of the mounting plate 10, and a thermal resistance between the thermoelectric modules 30 and the mounting plate 10 can be made extremely small.
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