| 摘要 |
<p>PURPOSE: To form an overall device compact, to decrease weight, and to reduce cost by a method, wherein an arrangement distance between gas control apparatus is shortened and the number of processing spots and the number of part items are decreased. CONSTITUTION: An insertion part 34 of a terminal flow passage block 5 and an insertion part 26 of an intermediate flow passage block 4 are inserted in the through-hole 21 of an apparatus mounting block 3, and the fixing parts 32 and 25 of the terminal flow passage block 5 and the intermediate flow passage block 4 are fixed at a base plate by means of bolts 42. Simultaneously, the body 9 of gas control apparatuses 6, 7, and 8 is inserted in the insertion hole 20 of the block 3. In a state that the gas passages 28 and 37 of the flow passage blocks 4 and 5, and the gas inflow passage 10 and the gas outflow passage 11 of a gas control apparatus are caused to communicate with each other, the body 9 is mounted on the apparatus mounting block 3 by a union nut 17. By fixing the flow passage blocks 4 and 5 to a base plate so as not to connect the flow passage blocks 4 and 5 directly to each other, distance of arrangement between the gas control apparatuses is shortened, and the number of processing spots and the number of parts are decreased.</p> |
