| 摘要 |
<p>PURPOSE: To improve response sensitivity and setting accuracy and further to easily set vacuum pressure by decreasing dead zone. CONSTITUTION: A small amount of atmosphere introduced from an atmosphere port 88 and throttled by a bleed hole 90 is introduced through a bleed passage 86 into a vacuum chamber 78, further introduced through a feedback passage 76 into a pressure regulating port 50, and sucked toward a vacuum port 46 side via the gap between a seal member 66 of a valve element 58 and a sitting part 68, thus the encroachment of the seal member 66 to the valve element 58 sitting on the sitting part 68 can be prevented.</p> |
