发明名称 A THIN FILM RESISTOR DEVICE AND A METHOD OF MANUFACTURE THEREFOR
摘要 The present invention provides a thin film resistor and method of manufacture therefor. The thin film resistor comprises a resistive layer located on a first dielectric layer, first and second contact pads located on the resistive layer, and a second dielectric layer located over the resistive layer and the first and second contact pads. In an illustrative embodiment, the thin film resistor further includes a first interconnect that contacts the first contact pad and a second interconnect that contacts the second contact pad.
申请公布号 WO0106547(A1) 申请公布日期 2001.01.25
申请号 WO2000US19010 申请日期 2000.07.13
申请人 LUCENT TECHNOLOGIES INC. 发明人 HUTTEMANN, ROBERT, D.;TEREFENKO, GEORGE, J.
分类号 H01C7/00;H01C17/075;H01C17/08;H01L21/02;H01L23/522;H01L23/532;H01L27/08 主分类号 H01C7/00
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