发明名称 |
A THIN FILM RESISTOR DEVICE AND A METHOD OF MANUFACTURE THEREFOR |
摘要 |
The present invention provides a thin film resistor and method of manufacture therefor. The thin film resistor comprises a resistive layer located on a first dielectric layer, first and second contact pads located on the resistive layer, and a second dielectric layer located over the resistive layer and the first and second contact pads. In an illustrative embodiment, the thin film resistor further includes a first interconnect that contacts the first contact pad and a second interconnect that contacts the second contact pad. |
申请公布号 |
WO0106547(A1) |
申请公布日期 |
2001.01.25 |
申请号 |
WO2000US19010 |
申请日期 |
2000.07.13 |
申请人 |
LUCENT TECHNOLOGIES INC. |
发明人 |
HUTTEMANN, ROBERT, D.;TEREFENKO, GEORGE, J. |
分类号 |
H01C7/00;H01C17/075;H01C17/08;H01L21/02;H01L23/522;H01L23/532;H01L27/08 |
主分类号 |
H01C7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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