发明名称 USE OF MULTI-LAYER THIN FILMS AS STRESS SENSORS
摘要 The present invention provides a pressure sensing device that includes at least one GMR sensor, and preferably an array of GMR sensors, with each GMR sensor having a conducting spacer layer interposed between two ferromagnetic layers. In an unbiased state, the magnetization vector of each of the ferromagnetic layers is preferably parallel to each other. Upon application of a current, however, the magnetization vector of each ferromagnetic layer is changed, preferably to an antiparallel position, in which state the sensor is used to then sense stress applied thereto. Upon application of stress, the magnetization vectors of both free magnetic layers will rotate, thus causing a corresponding and proportionally related change in the resistance of the sensor. This change in resistance can be sensed and used to calculate the stress applied thereto.
申请公布号 WO0106222(A2) 申请公布日期 2001.01.25
申请号 WO2000US19709 申请日期 2000.07.19
申请人 FIDELICA MICROSYSTEMS, INC. 发明人 GANAPATHI, SRINIVASAN;PRAKASH, SHIVA
分类号 G01L1/12;(IPC1-7):G01L9/00 主分类号 G01L1/12
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