Handling apparatus for front opening unified pod

摘要

The present invention relates to a handling apparatus for the manual handling of a handless Front Opening Unified Pod (FOUP) containing wafers with a robotic flange (6) to which a robot arm is attachable. In order to overcome the requirement of a pitch between the FOUPs a handling apparatus is suggested with a bar (7) extending substantially along a first axis (8), with two handles (9) extending substantially perpendicularly to said first axis (8) and two grippers (11) extending substantially perpendicularly to said first axis (8) for being clamped onto said robotic flange (6).