CONTROLLABLE SELECTIVE OXIDATION ON VCSELS

摘要

A method for controlling the oxidation of a layer containing an oxidisable material extending in a transverse plane in a vertical cavity surface emitting laser (VCSEL), involves selectively implanting ions into transversely spaced regions of the layer to change the concentration of the oxidisable material in the transversely spac ed regions. Subsequently the layer is oxidised and the degree of oxidation of the layer varies in a transverse direction between the implanted regions and non-implanted regions of the layer.