METHOD FOR ETCHING LOW K DIELECTRICS,申请号EP19990916252-传众专利搜索

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发明名称	METHOD FOR ETCHING LOW K DIELECTRICS
摘要
申请公布号	EP1070346(A1)	申请公布日期	2001.01.24
申请号	EP19990916252	申请日期	1999.03.31
申请人	APPLIED MATERIALS, INC.	发明人	YAN, CHUN;HSUEH, GARY, C.;YE, YAN;MA, DIANA, XIAOBING
分类号	H01L21/302;H01L21/3065;H01L21/311;(IPC1-7):H01L21/311	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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