发明名称 Process for CMOS devices of non volatile memories and vertical bipolar transistors with high gain.
摘要 <p>This invention refers to a bipolar transistor obtained by means of a process for CMOS devices of non volatile memories, and in particular to an integrated circuit comprising a vertical transistor at high gain. Besides it refers to a building process of a bipolar transistor obtained by means a process for CMOS devices of non volatile memories. In one embodiment the integrated circuit obtained by means of a process for CMOS devices of non volatile memories comprises a semiconductor substrate (2) having a first type of conductivity, a pMOS transistor formed above said substrate (2), a nMOS transistor formed above said substrate (2), a bipolar transistor (1) comprising: a buried semiconductor layer (4) having a second type of conductivity placed at a prefixed depth from the surface of said bipolar transistor (1), a isolation semiconductor region (5) having a second type of conductivity in direct contact with said buried semiconductor layer (4) and suitable for delimiting a portion of said substrate (2) forming a base region (3), a emitter region (8) of said transistor (1) formed within said base region (3) having a second type of conductivity, a base contact region (6) of said transistor (1) formed within said base region (3) having a first type of conductivity, a collector contact region (7) of said transistor (1) formed within said isolation semiconductor region (5) having a second type of conductivity, characterised in that said base region (3) has a doping concentration included between 10&lt;16&gt; and 10&lt;17&gt; atoms/cm&lt;3&gt;. &lt;IMAGE&gt;</p>
申请公布号 EP1071133(A1) 申请公布日期 2001.01.24
申请号 EP19990830468 申请日期 1999.07.21
申请人 STMICROELECTRONICS S.R.L. 发明人 VENDRAME, LORIS;GHEZZI, PAOLO
分类号 H01L21/8249;H01L29/06;H01L29/732;(IPC1-7):H01L27/105;H01L21/824 主分类号 H01L21/8249
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