发明名称 |
Lamp unit and light radiating type heating device |
摘要 |
<p>A plurality of filament lamps having filaments arranged within an annular light emitting tube are arranged coaxially within a plane to provide a group of lamps, and a plurality of groups of lamps are arranged in a step-like manner with their centers coinciding with each other to form a lamp unit LU. A lamp chamber having this lamp unit arranged therein is provided with a cooling air inlet port and a cooling air outlet port. An inner surface of a side wall of the lamp chamber is provided with a mirror. A workpiece holding block arranged in a light radiation chamber below the lamp chamber can be rotated. <IMAGE></p> |
申请公布号 |
EP1071310(A2) |
申请公布日期 |
2001.01.24 |
申请号 |
EP20000115795 |
申请日期 |
2000.07.21 |
申请人 |
USHIODENKI KABUSHIKI KAISHA |
发明人 |
SUZUKI, SHINJI |
分类号 |
H01L21/22;H01L21/00;H01L21/205;H01L21/26;H01L21/324;H05B3/00;(IPC1-7):H05B3/00 |
主分类号 |
H01L21/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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