发明名称 Lamp unit and light radiating type heating device
摘要 <p>A plurality of filament lamps having filaments arranged within an annular light emitting tube are arranged coaxially within a plane to provide a group of lamps, and a plurality of groups of lamps are arranged in a step-like manner with their centers coinciding with each other to form a lamp unit LU. A lamp chamber having this lamp unit arranged therein is provided with a cooling air inlet port and a cooling air outlet port. An inner surface of a side wall of the lamp chamber is provided with a mirror. A workpiece holding block arranged in a light radiation chamber below the lamp chamber can be rotated. &lt;IMAGE&gt;</p>
申请公布号 EP1071310(A2) 申请公布日期 2001.01.24
申请号 EP20000115795 申请日期 2000.07.21
申请人 USHIODENKI KABUSHIKI KAISHA 发明人 SUZUKI, SHINJI
分类号 H01L21/22;H01L21/00;H01L21/205;H01L21/26;H01L21/324;H05B3/00;(IPC1-7):H05B3/00 主分类号 H01L21/22
代理机构 代理人
主权项
地址