| 摘要 |
PROBLEM TO BE SOLVED: To obtain a member having high corrosion resistance, giving reduced amount of particles by forming a composite sintered compact from silicon carbide, silicon nitride and carbon. SOLUTION: This anticorrosive member comprises a composite sintered compact of silicon carbide, silicon nitride and carbon. Preferably the member has a porous structure of three-dimensionally connected silicon carbide, the void part of the porous structure occupied by silicon nitride and carbon and <=3% porosity of the sintered compact. Silicon carbide powder having 0.1-2 μm average particle diameter is mixed with a binder, molded and calcined in an inert atmosphere to give a porous body having a high porosity. The porous body is fired in an atmosphere comprising a nitrogen gas as an essential component at >=1,000 deg.C under a nitrogen gas pressure of >=500 atmospheric pressure to give a complex sintered compact. The porosity before the firing is preferably 5-25%. The composition of the composite sintered compact is preferably 50-90 wt.% of silicon carbide, 10-40 wt.% of silicon nitride and 1-10 wt.% of free carbon. The anticorrosive member is suitable as a constructional member for a semiconductor/liquid crystal production apparatus. |
