| 摘要 |
PROBLEM TO BE SOLVED: To obtain a stable film thickness and composition by setting the maximum value of the film thickness of an inorganic oxide layer existing on at least one surface of a plastic film roll at specific times the minimum value or below. SOLUTION: The maximum value of the film thickness of the inorganic oxide layer is <=1.5 times the minimum value. A device, which is arranged with monitor devices utilizing fluorescent X-rays at specified intervals in the film transverse direction of a vapor deposition device and is constituted to allow the measurement of the film thickness even in the film flow direction by continuously making measurement, is used to achieve such numerical value. Production is executed under the application of control. Inorganic oxides are metal oxides, such as aluminum oxide and magnesium oxide, and semi-metal oxides, such as silicon oxide, or their composites. The thickness of the inorganic oxide layer is preferably 10 to 50 nm. The quality defect of a barrier property is eliminated in the final products after fabricating, such as printing, laminating and bag making, by the roll film having such uniform film thickness and composition. Further, the minimum required thin-film layer is merely necessitated and, therefore, the efficient vapor deposition may be executed and the process is cost effective.
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