发明名称 POLISHING MACHINE
摘要 PROBLEM TO BE SOLVED: To control a carrier to stop in its home position in the revolving direction and rotating direction without rotating a sun gear much after the completion of polishing. SOLUTION: Ten carriers 6 are meshed at equal spaces between a sun gear 4 and an internal gear 5, and each carrier 6 is provided with five workpiece holding holes 7 at equal spaces. The gear ratio of the sun gear 4, carrier 6 and internal gear 5 is set to 3:1:5, and a control part 30 controls to stop the rotation of the sun gear 4 when the sun gear 4 is rotated integer times as many as 4/15 rotation. Each carrier 6 is stopped in its home position in the revolving direction and rotating direction by the stop of the sun gear 4, and the workpiece holding holes 7 of each carrier 6 are positioned in the home position in the revolving direction and rotating direction.
申请公布号 JP2001018153(A) 申请公布日期 2001.01.23
申请号 JP19990196078 申请日期 1999.07.09
申请人 SPEEDFAM CO LTD 发明人 IKEMOTO KIYOSHI;UENISHI TAKAHIDE;NAGAI MANABU;YAMATANI AKIHIKO;NISHI YUKINORI;SUNADA JUNYA
分类号 B24B7/17;B24B37/08 主分类号 B24B7/17
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