发明名称 |
Method for improving crystalline thin films with a contoured beam pulsed laser |
摘要 |
A method is presented for crystallizing a thin film on a substrate by generating a beam of pulsed optical energy, countouring the intensity profile of the beam, and illuminating the thin film with the beam to crystallize the thin film into a single crystal lattice structure.
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申请公布号 |
US6176922(B1) |
申请公布日期 |
2001.01.23 |
申请号 |
US19990413707 |
申请日期 |
1999.10.06 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
AKLUFI MONTI E.;RUSSELL STEPHEN D. |
分类号 |
B23K26/06;C23C14/58;C30B13/24;(IPC1-7):C30B1/06 |
主分类号 |
B23K26/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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