发明名称 Method for improving crystalline thin films with a contoured beam pulsed laser
摘要 A method is presented for crystallizing a thin film on a substrate by generating a beam of pulsed optical energy, countouring the intensity profile of the beam, and illuminating the thin film with the beam to crystallize the thin film into a single crystal lattice structure.
申请公布号 US6176922(B1) 申请公布日期 2001.01.23
申请号 US19990413707 申请日期 1999.10.06
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY 发明人 AKLUFI MONTI E.;RUSSELL STEPHEN D.
分类号 B23K26/06;C23C14/58;C30B13/24;(IPC1-7):C30B1/06 主分类号 B23K26/06
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