Micromechanical membrane tilt-mirror switch

摘要

A micromechanical tilt mirror device that includes a membrane suspended by its ends over a substrate such that a mirror area of the membrane is asymmetrically positioned on the membrane whereby it is tilted when the membrane is deformed by electrostatic forces. This mirror tilt is used to steer an incident light beam in a prescribed direction. The mirror can be supported to provide tilt in either of two orthogonal directions with respect to a rest direction.